Science Park provides a unique environment for accelerating technological innovation, nurturing new star-up firms, attracting investment and generating economic growth. However, how to make the best decision in allocating resources and creating more profits is now an important issue for industrialist and Government policy. The purpose of this paper is to analyze efficiency and productivity growth of the six high-tech industries in Hsinchu Science Park in Taiwan for the period 2000-2006. This paper applied data envelopment analysis (DEA), a multiple inputs-multiple outputs evaluation, to analyze the relative performance. In order to find out the long-term effectiveness in productivity, the Window Analysis is adopted to seek the most recommended set of industries for Hsinchu Science Parkin Taiwan by measuring the performance changes over time. From the results, we know that industrial industrialist not only enhance their managerial skills but also increase and improve innovative performance and upgrade technology level. We think that each industry should enhance the linkage between different sectors and strengthen cross-industry relationship, in turn, improve the innovation and technology. Government also plays an important and critical role for industrial upgrading and promotion. Government must become a facilitator, enabling business and consumers to adapt to the demands and opportunities of the new economy. Therefore, they should build an innovative-cluster. The results of these analyses illustrate some policy implications for Taiwan and other countries facing the similar problems.